DOMADIA™ Tungsten and Molybdenum Consumable Parts for Ion Implantation
Tungsten and Molybdenum Consumable Parts for Ion Implantation
Introduction
In the semiconductor industry, where precision and purity are paramount, consumable components play a critical role in the reliability and efficiency of ion implantation systems. DOMADIA™ offers premium-quality Tungsten and Molybdenum consumable parts specifically engineered for ion implantation, delivering exceptional durability, purity, and performance.
About the Product
DOMADIA™ supplies a comprehensive range of Tungsten and Molybdenum consumables that meet the rigorous demands of ion implanter systems. These parts are manufactured using high-purity materials and strict quality controls to ensure optimal function in high-energy environments.
Our consumables are compatible with leading ion implanter brands such as Applied Materials, Axcelis, and others—ensuring a seamless replacement experience.
Key Features and Benefits
1. High Purity Materials: ≥99.95% pure Tungsten and Molybdenum to reduce contamination and extend part life.
2. Superior Thermal Stability: Withstands high implantation temperatures without deformation or degradation.
3. Excellent Wear Resistance: Engineered for prolonged operational cycles and consistent performance.
4. Precision Manufacturing: Tight dimensional tolerances for critical implant alignment and fit.
5. OEM Compatibility: Fully compatible with major ion implanter platforms.
Key Properties of DOMADIA™ Tungsten and Molybdenum Consumables
| Property | Tungsten (W) | Molybdenum (Mo) | Benefits for Ion Implantation |
| Melting Point | ~3420°C | ~2620°C | Withstands extreme thermal loads without deformation |
| Purity Level | ≥99.95% | ≥99.95% | Reduces contamination and ensures ultra-clean processing |
| Wear Resistance | Excellent (very high hardness) | Very good | Enables longer life under ion bombardment |
| Thermal Conductivity | ~173 W/m·K | ~138 W/m·K | Promotes efficient heat dissipation during high-energy implant cycles |
| Thermal Expansion Coefficient | ~4.5 µm/m·K | ~5.0 µm/m·K | Maintains dimensional stability under fluctuating temperatures |
| Corrosion/Plasma Resistance | High | High | Ensures long-term performance in reactive plasma and vacuum conditions |
Applications
1. Beamline Assemblies
Components such as apertures, collimators, and suppression electrodes made from Tungsten or Molybdenum ensure accurate ion beam shaping, minimizing scattering and contamination.
2. End Station Modules
High-purity parts including liners and beam stops operate under intense ion bombardment, offering exceptional durability and protection for sensitive substrates.
3. Plasma Flood Subsystems
Molybdenum electrodes and shields provide consistent plasma uniformity and electrical stability, improving implantation quality across wafers.
4. Cooling & Heat Dissipation Units
Thermally conductive Molybdenum parts are used in assemblies where efficient heat transfer is essential to protect adjacent electronic components.
5. Electrostatic Chucks & Wafer Masks
Precision-machined Tungsten masks and clamping parts deliver high-temperature stability and dimensional accuracy for uniform ion distribution.
6. Process Isolation & Shielding
Robust shielding components reduce cross-contamination and protect internal structures during high-dose implant operations.
Why Choose Domadia™
At Domadia™, we merge metallurgical expertise with market responsiveness. With decades of experience in supplying high-performance materials to the semiconductor industry, we understand what precision means. Our commitment to material integrity, fast lead times, and application-specific customization makes us the preferred supplier for global fabs and equipment service providers.
Connect with Us
Looking to improve your ion implanter’s uptime and part performance? DOMADIA™ is here to help. Our experts work closely with you to understand your equipment and process needs—delivering custom and standard parts that exceed expectations. Whether you’re upgrading or maintaining, partner with us for dependable, high-quality consumables.
Frequently Asked Questions
1. What are the purity levels of DOMADIA™ Tungsten and Molybdenum parts?
All parts are fabricated with ≥99.95% purity to ensure minimal contamination and superior stability.
2. Can DOMADIA™ consumables be used with all ion implanters?
Yes, we supply compatible parts for major OEM platforms like Applied Materials, Axcelis, and others.
3. Do you offer custom machining?
Absolutely. We offer application-specific customization based on design drawings or legacy part samples.
4. What is the expected lifespan of these parts?
Depending on usage conditions, our parts typically last 20–30% longer than conventional alternatives.
5. How are the parts packaged for cleanroom compatibility?
Each part is ultrasonically cleaned and vacuum-packed in Class 100 cleanroom environments.
6. Can you supply parts in small batch volumes?
Yes, we support both small volume R&D batches and high-volume fab operations.
7. Do you offer technical support for part installation?
Yes, our team provides documentation and application support during replacement and ramp-up.
8. What’s the typical lead time for orders?
Standard parts ship / custom parts may take 3–4 weeks based on design.
Ready to Buy?
Reach out to us today to discuss your requirements:
Call / WhatsApp: +91-9594066275
Email us: sales@domadia.com
Visit our website: www.domadia.com
Error: Contact form not found.
Products
